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AXCELIS TECHNOLOGIES INC Director's Dealing 2019

May 17, 2019

31374_dirs_2019-05-17_01502d61-e010-40b0-ba51-d3a78fc0580d.zip

Director's Dealing

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SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2019-05-15

Reporting Person: Lawson Douglas A. (EVP, Corporate Mktg & Strategy)

Non-Derivative Transactions

Date Security Code Shares Price A/D Holdings After Ownership
2019-05-15 Common Stock A 11385 $0.00 Acquired 55254 Direct
2019-05-15 Common Stock A 11385 $0.00 Acquired 66639 Direct
2019-05-16 Common Stock F 1404 $16.95 Disposed 65235 Direct
2019-05-16 Common Stock F 558 $16.95 Disposed 64677 Direct
2019-05-17 Common Stock F 644 $16.50 Disposed 64033 Direct

Holdings (Non-Derivative)

Security Shares Ownership
Common Stock 3125 Indirect

Footnotes

F1: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 15, 2020, May 15, 2021, May 15, 2022 and May 15, 2023.

F2: Of the shares held as of May 15, 2019, 38,877 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

F3: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of employment, up to 50% of these restricted stock units will vest on each of February 28, 2020 and February 28, 2021, based on performance vesting criteria. Unvested restricted stock units will forfeit on February 28, 2020.

F4: Of the shares held as of May 15, 2019, 50,262 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

F5: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F6: Represents the closing price of the common stock on the date of the tax withholding.

F7: Of the shares held as of May 16, 2019, 43,592 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

F8: Of the shares held as of May 17, 2019, 41,404 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.