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AXCELIS TECHNOLOGIES INC Director's Dealing 2019

May 23, 2019

31374_dirs_2019-05-23_566a2f44-329e-44ab-8fea-fa4d5c6fdd95.zip

Director's Dealing

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SEC Form 4/A — Form 4/A

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2019-05-15

Reporting Person: Low Russell (EVP, Engineering)

Non-Derivative Transactions

Date Security Code Shares Price A/D Holdings After Ownership
2019-05-15 Common Stock A 13183 $0.00 Acquired 48600 Direct
2019-05-15 Common Stock A 13183 $0.00 Acquired 61783 Direct
2019-05-16 Common Stock F 618 $16.95 Disposed 61165 Direct
2019-05-17 Common Stock F 761 $16.50 Disposed 60404 Direct

Footnotes

F1: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 15, 2020, May 15, 2021, May 15, 2022 and May 15, 2023.

F2: Of the shares held as of May 15, 2019, 38,355 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

F3: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of employment, up to 50% of these restricted stock units will vest on each of February 28, 2020 and February 28, 2021, based on performance vesting criteria. Unvested restricted stock units will forfeit on February 28, 2020.

F4: Of the shares held as of May 15, 2019, 51,538 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

F5: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F6: Represents the closing price of the common stock on the date of the tax withholding.

F7: Of the shares held as of May 16, 2019, 49,506 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

F8: Of the shares held as of May 17, 2019, 47,006 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.