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AXCELIS TECHNOLOGIES INC Director's Dealing 2018

May 16, 2018

31374_dirs_2018-05-16_c6dc0ed0-1732-4886-b553-2bd1445e86ee.zip

Director's Dealing

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SEC Form 3 — Initial Statement of Beneficial Ownership

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2018-05-16

Reporting Person: Chiu Tzu Yin (Director)

Holdings (Non-Derivative)

Security	Shares	Ownership
Common Stock	0	Direct

Footnotes

F1: Mr. Chiu did not own any reportable securities, directly or indirectly, prior to becoming a reporting person. A Power of Attorney is filed as Exhibit 24.1 to this Form 3.