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AXCELIS TECHNOLOGIES INC Director's Dealing 2018

May 18, 2018

31374_dirs_2018-05-18_07160179-1791-47ea-9ee2-f66cecf16ebc.zip

Director's Dealing

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SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2018-05-16

Reporting Person: FALLON LYNNETTE C (Executive VP, HR/Legal)

Non-Derivative Transactions

Date Security Code Shares Price A/D Holdings After Ownership
2018-05-16 Common Stock F 1406 $22.40 Disposed 51110 Direct
2018-05-16 Common Stock A 7589 $0.00 Acquired 58699 Direct
2018-05-16 Common Stock A 7589 $0.00 Acquired 66288 Direct
2018-05-17 Common Stock F 645 $22.40 Disposed 65643 Direct

Footnotes

F1: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on May 16, 2018.

F2: Represents the closing price on May 16, 2018.

F3: Of the shares held as of May 16, 2018, 18,295 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

F4: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 16, 2019, May 16, 2020, May 16, 2021 and May 16, 2022.

F5: Of the shares held as of May 16, 2018, 25,884 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

F6: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of employment, up to 50% of these restricted stock units will vest on each of February 28, 2019 and February 28, 2020, based on performance vesting criteria. Unvested restricted stock units will forfeit on February 28, 2019.

F7: Of the shares held as of May 16, 2018, 33,473 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

F8: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on May 17, 2018.

F9: Represents the closing price on May 17, 2018.

F10: Of the shares held as of May 17, 2018, 31,286 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.