AXCELIS TECHNOLOGIES INC — Director's Dealing 2017

Feb 8, 2017

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2017-02-06

Reporting Person: Lawson Douglas A. (EVP, Corporate Mktg & Strategy)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2017-02-06	Common Stock	M	3125	$3.72	Acquired	34479	Direct
2017-02-06	Common Stock	M	4687	$7.96	Acquired	39166	Direct
2017-02-06	Common Stock	M	7813	$7.20	Acquired	46979	Direct
2017-02-06	Common Stock	S	3125	$16.50	Disposed	43854	Direct
2017-02-06	Common Stock	S	1987	$16.45	Disposed	41867	Direct
2017-02-06	Common Stock	S	100	$16.50	Disposed	41767	Direct
2017-02-06	Common Stock	S	2600	$16.47	Disposed	39167	Direct
2017-02-06	Common Stock	S	7813	$16.45	Disposed	31354	Direct

Derivative Transactions

Date	Security	Exercise Price	Code	Shares	A/D	Expiration	Underlying	Ownership
2017-02-06	Stock Option (right to buy)	$3.72	M	3125	Acquired	2019-07-16	Common Stock (3125)	Direct
2017-02-06	Stock option (right to buy)	$7.96	M	4687	Acquired	2020-07-15	Common Stock (4687)	Direct
2017-02-06	Stock option (right to buy)	$7.20	M	7813	Acquired	2021-07-15	Common Stock (7813)	Direct

Holdings (Non-Derivative)

Security	Shares	Ownership
Common Stock	3125	Indirect

Footnotes

F1: Of the shares held as of February 6, 2017, 25,455 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forefeiture.