AXCELIS TECHNOLOGIES INC — Director's Dealing 2017

May 26, 2017

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2017-05-25

Reporting Person: BREWER KEVIN J (EVP & Chief Financial Officer)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2017-05-25	Common Stock	M	37500	$6.40	Acquired	106684	Direct
2017-05-25	Common Stock	S	37500	$21.96	Disposed	69184	Direct
2017-05-26	Common Stock	M	56250	$7.96	Acquired	125434	Direct
2017-05-26	Common Stock	S	56250	$21.92	Disposed	69184	Direct

Derivative Transactions

Date	Security	Exercise Price	Code	Shares	A/D	Expiration	Underlying	Ownership
2017-05-25	Stock Option (right to buy)	$6.40	M	37500	Disposed	2020-07-15	Common Stock (37500)	Direct
2017-05-26	Stock option (right to buy)	$7.96	M	56250	Disposed	2020-07-15	Common Stock (56250)	Direct

Footnotes

F1: Of the shares held as of May 25 and 26, 2017, 39,167 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forefeiture.

F2: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $21.90 to $22.10, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares purchased at each separate price.

F3: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $21.80 to $21.95, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares purchased at each separate price.