AXCELIS TECHNOLOGIES INC — Director's Dealing 2016

Aug 8, 2016

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2016-08-05

Reporting Person: George Arthur L Jr (Director)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2016-08-05	Common Stock	P	100	$11.23	Acquired	27987	Direct
2016-08-05	Common Stock	P	4691	$11.24	Acquired	32678	Direct
2016-08-05	Common Stock	P	209	$11.28	Acquired	32887	Direct

Footnotes

F1: Of the shares held as of August 5, 2016, 16,075 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.