AMTECH SYSTEMS INC — Director's Dealing 2015

May 26, 2015

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AMTECH SYSTEMS INC (ASYS)
CIK: 0000720500
Period of Report: 2015-05-26

Reporting Person: WHANG JONG S (Director, Executive Chairman)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2015-05-26	Amtech Systems, Inc. $.01 par value common stock	M	6250	$2.95	Acquired	47916	Direct
2015-05-26	Amtech Systems, Inc. $.01 par value common stock	M	10000	$6.15	Acquired	57916	Direct
2015-05-26	Amtech Systems, Inc. $.01 par value common stock	M	13750	$6.9	Acquired	71666	Direct

Derivative Transactions

Date	Security	Exercise Price	Code	Shares	A/D	Expiration	Underlying	Ownership
2015-05-26	Amtech Systems, Inc. Employee Stock Option	$2.95	M	6250	Acquired	2022-12-11	Amtech Systems, Inc. $.01 par value common stock (6250)	Direct
2015-05-26	Amtech Systems, Inc. Employee Stock Option	$6.15	M	10000	Acquired	2019-11-20	Amtech Systems, Inc. $.01 par value common stock (10000)	Direct
2015-05-26	Amtech Systems, Inc. Employee Stock Option	$6.9	M	13750	Acquired	2016-12-08	Amtech Systems, Inc. $.01 par value common stock (13750)	Direct

Footnotes

F1: Exercise of stock option.

F2: This is the number of derivative securities, with the same terms and conditions, following the reported transaction.

F3: This is the number of derivative securities, with the same terms and conditions, following the reported transaction.

F4: This is the number of derivative securities, with the same terms and conditions, following the reported transaction. Total of all derivative securities, with different terms and conditions, held following the reported transaction is 185,417.