AMTECH SYSTEMS INC — Director's Dealing 2010

Mar 16, 2010

SEC Form 3 — Initial Statement of Beneficial Ownership

Issuer: AMTECH SYSTEMS INC (ASYS)
CIK: 0000720500
Period of Report: 2010-03-11

Reporting Person: Pentinga Fokko (President)

Holdings (Non-Derivative)

Security	Shares	Ownership
Amtech Systems, Inc. $.01 par value common stock	16500	Direct

Holdings (Derivative)

Security	Exercise Price	Expiration	Underlying	Shares	Ownership
Amtech Systems, Inc. Employee Stock Option	$6.9	2016-12-08	Amtech Systems, Inc. $.01 par value common stock (7500)		Direct
Amtech Systems, Inc. Employee Stock Option	$7	2017-01-30	Amtech Systems, Inc. $.01 par value common stock (250)		Direct
Amtech Systems, Inc. Employee Stock Option	$14.79	2017-12-06	Amtech Systems, Inc. $.01 par value common stock (12500)		Direct
Amtech Systems, Inc. Employee Stock Option	$3.8	2018-12-09	Amtech Systems, Inc. $.01 par value common stock (25000)		Direct
Amtech Systems, Inc. Employee Stock Option	$5.2	2019-12-15	Amtech Systems, Inc. $.01 par value common stock (15000)		Direct
Amtech Systems, Inc. Employee Stock Option	$6.15	2019-11-20	Amtech Systems, Inc. $.01 par value common stock (10000)		Direct

Footnotes

F1: Includes 11,875 shares unvested restricted stock that will vest in varying amounts and various dates through November 20, 2013.

F2: The first date on which any of the options become exercisable. One-fourth of the stock option granted vest on the first date options become exercisable and on each of next three anniversaries thereof.