AMTECH SYSTEMS INC — Director's Dealing 2010

Aug 10, 2010

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AMTECH SYSTEMS INC (ASYS)
CIK: 0000720500
Period of Report: 2010-08-06

Reporting Person: HASS ROBERT T (Chief Accounting Officer)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2010-08-06	Restricted Stock	A	667	—	Acquired	18625	Direct

Derivative Transactions

Date	Security	Exercise Price	Code	Shares	A/D	Expiration	Underlying	Ownership
2010-08-06	Stock Option	$10.64	A	1333	Acquired	2020-08-06	Common Stock (1333)	Direct

Footnotes

F1: The restricted stock and stock options vest in 4 equal annual installments beginning on August 6, 2011.

F2: Price omitted because transaction is a grant of restricted stock.

F3: Price omitted because transaction is a grant of stock options.