AMTECH SYSTEMS INC — Director's Dealing 2010

Dec 10, 2010

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AMTECH SYSTEMS INC (asys)
CIK: 0000720500
Period of Report: 2010-12-10

Reporting Person: Pentinga Fokko (President)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2010-12-10	Amtech Systems, Inc. $.01 par value common stock	M	1875	$6.9	Acquired	27500	Direct
2010-12-10	Amtech Systems, Inc. $.01 par value common stock	M	250	$7	Acquired	27750	Direct
2010-12-10	Amtech Systems, Inc. $.01 par value common stock	M	9375	$14.79	Acquired	37125	Direct
2010-12-10	Amtech Systems, Inc. $.01 par value common stock	S	11500	$25.03	Disposed	25625	Direct
2010-12-10	Amtech Systems, Inc. $.01 par value common stock	S	1875	$25.01	Disposed	23750	Direct

Derivative Transactions

Date	Security	Exercise Price	Code	Shares	A/D	Expiration	Underlying	Ownership
2010-12-10	Amtech Systems, Inc. Employee Stock Option	$6.9	M	1875	Acquired	2016-12-08	Amtech Systems, Inc. $.01 par value common stock (1875)	Direct
2010-12-10	Amtech Systems, Inc. Employee Stock Option	$7	M	250	Acquired	2017-01-30	Amtech Systems, Inc. $.01 par value common stock (250)	Direct
2010-12-10	Amtech Systems, Inc. Employee Stock Option	$14.79	M	9375	Acquired	2017-12-06	Amtech Systems, Inc. $.01 par value common stock (9375)	Direct

Footnotes

F1: Price omitted because the transaction is a grant of a stock option.

F2: This is the number of derivative securities, with the same terms and conditions, following the reported transaction.

F3: This is the number of derivative securities, with the same terms and conditions, following the reported transaction. Total of all derivative securities, with different terms and conditions, held following the reported transaction is 61,875.